DB-Sputtering, Reflection and Range Values
Numerical data on sputtering yield, reflection coefficients and mean range
calculated by Dr. Wolfgang Eckstein using the Monte Carlo program code
(TRIM.SP[1,2]).
[1] J. P. Biersack and W. Eckstein, Appl. Phys. A 34 (1984) 73.
[2] W. Eckstein, Computer Simulation of Ion-Solid Interactions (Springer-Verlag, Berlin, Heidelberg, 1991)
UPDATE
- 4 Mar. 2003
- Numerical data for mono-atomic targets of Cu - U, compound targets and layered targets have been up.
- 28 Feb. 2003
- Numerical data for mono-atomic targets of V, Fe and Ni have been up. Contents and Representaion of Data has been revised.
- 26 Feb. 2003
- Numerical data for mono-atomic targets of Al, Si and Ti have been up.
- 25 Feb. 2003
- Numerical data for mono-atomic target of C have been up.
- 21 Feb. 2003
- Numerical data for mono-atomic targets of Li and Be have been up. Contents and Representaion of Data has been revised.
- 17 Feb. 2003
- Contents and Representaion of Data has been revised.
- 10 Feb. 2003
- Frame version.
- Feb. 2003
- Alpha version.
Copyright (c) 2003 National Institute for Fusion Science