DB-Sputtering, Reflection and Range Values


Numerical data on sputtering yield, reflection coefficients and mean range calculated by Dr. Wolfgang Eckstein using the Monte Carlo program code (TRIM.SP[1,2]).

[1] J. P. Biersack and W. Eckstein, Appl. Phys. A 34 (1984) 73.
[2] W. Eckstein, Computer Simulation of Ion-Solid Interactions (Springer-Verlag, Berlin, Heidelberg, 1991)


UPDATE

4 Mar. 2003
Numerical data for mono-atomic targets of Cu - U, compound targets and layered targets have been up.
28 Feb. 2003
Numerical data for mono-atomic targets of V, Fe and Ni have been up. Contents and Representaion of Data has been revised.
26 Feb. 2003
Numerical data for mono-atomic targets of Al, Si and Ti have been up.
25 Feb. 2003
Numerical data for mono-atomic target of C have been up.
21 Feb. 2003
Numerical data for mono-atomic targets of Li and Be have been up. Contents and Representaion of Data has been revised.
17 Feb. 2003
Contents and Representaion of Data has been revised.
10 Feb. 2003
Frame version.
Feb. 2003
Alpha version.

Copyright (c) 2003 National Institute for Fusion Science